Precursor Powerhouse | August 3, 2009 Issue - Vol. 87 Issue 31 | Chemical & Engineering News
 
 
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Volume 87 Issue 31 | pp. 18-19
Issue Date: August 3, 2009

Precursor Powerhouse

Air liquide finds success in a specialized electronic materials niche
Department: Business
Keywords: Air Liquide, semiconductor, precursor

In 1999, researchers at one of Air Liquide’s customer companies approached the French industrial gases giant for help with a problem: They needed a nonchlorinated alternative to dichlorosilane, a precursor used to deposit silicon nitride films during semiconductor manufacturing.

What started as an effort to answer that simple request is now a major business for Air Liquide. The company’s 10-year-old advanced precursor unit has millions of dollars in annual sales and, until this . . .

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