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Materials
Inpria to scale up EUV photoresists
by Michael McCoy
July 18, 2016
| A version of this story appeared in
Volume 94, Issue 29
The electronic materials start-up Inpria plans to build a facility in Corvallis, Ore., to manufacture its metal oxide-based photoresists. Developed in Oregon State University’s chemistry department, the resists are intended to be used with extreme UV lithography to create computer chip circuit lines less than 7 nm wide. The company says it will pay for the plant by tapping into $10 million it raised from investors earlier this year.
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