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Semiconductor Device Fabrication: from 12 to 3 Nanometers – How Will You Get There?

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  September 17, 2020

  8:00 a.m. PDT, 11:00 a.m. EDT, 16:00 BST, 17:00 CEST

 

Overview

 

Smaller, faster and more energy-efficient integrated circuitry are the rules of the game in the semiconductor industry, which is constantly evolving and transforming its manufacturing processes to deliver on Moore's law – a journey that constantly calls for the use of ultrapure materials and chemicals, where sub-part per trillion, and eventually sub-part per quadrillion, impurities detection is required.

How do semiconductor device manufacturers get to smaller nanometer nodes and what analytical instrumentation do they require to achieve faster, smaller, more energy-efficient integrated circuitry?

During this webcast, you will learn about recent advancements in impurity testing techniques (multi-quadrupole ICP-MS and tri-range IR), empowering semiconductor device manufacturers with the right tools to transition from 12 to 3 nanometers to ensure contaminant-free products.

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Key Learning Objectives

  • What: Recent advancements in impurity testing techniques (multi-quad ICP-MS and tri-range IR), empowering semiconductor device manufacturers with the right tools to transition from 12 to 3 nanometers.
  • Why: Contamination – particles, metallic or airborne molecules – can have a detrimental impact on the yield and reliability of semiconductor device manufacturing and its process control. For each of these contaminants, a set of testing techniques or analytical tools are used to ensure a contaminant-free product is produced.
  • How: State-of-the-art testing technologies are used to ensure materials and chemicals are free from impurities and that production processes are free from contaminant. In this webinar, we will discuss:
    • Achieving sub-ppt metallic impurities detection in various chemicals used in semiconductor manufacturing: Chady Stephan
    • IR testing of raw materials, mapping of wafers and defect testing/contaminant analysis using FT-IR microscopy: Ian Robertson

Who Should Attend

  • Semicon Researchers / R&D Managers
  • Laboratory Managers / Directors / Supervisors
  • Laboratory Technicians / Operators
 

Speakers

Chady Stephan, PhD
Chemicals Market Leader,
PerkinElmer Inc.
Ian Robertson
Senior Application Scientist,
PerkinElmer Inc.
 

Moderator

Melissa O'Meara
Forensic Science Consultant,
C&EN Media Group
 

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