Enhanced Cleanroom Air Quality Monitoring for Airborne Molecular Contaminants Using Direct MS
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Enhanced Cleanroom Air Quality Monitoring for Airborne Molecular Contaminants Using Direct MS

December 6, 2017

8:00 a.m. PST / 11:00 a.m. EST / 16:00 GMT / 17:00 CET

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Airborne molecular contaminants (AMCs) cause major product quality issues in modern semiconductor fabrication, even at very low levels (part-per-billion, ppb, concentrations and below). Currently multiple different tools are used to detect certain classes of AMCs with varying degrees of effectiveness.

Selected ion flow tube mass spectrometry (SIFT-MS) is a unique analytical tool that provides comprehensive, high-sensitivity detection of volatile organic, and semivolatile organic compounds (VOCs and SVOCs), and inorganic gases (including HCl, HF, and SOx) within seconds. As a single, comprehensive tool with rapid analysis, SIFT-MS provides great economic benefit because it detects and identifies a wider range of AMCs issues and does so faster. This results in increased product yield and reduced maintenance and replacement in infrastructure.

Please join us for this webinar, which will introduce the SIFT-MS technique, compare performance with other detection technologies, and describe its application to AMC monitoring – from the front-opening unified pod (FOUP) to the cleanroom.

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Participants Will Learn:


• The fundamentals of the selected ion flow tube mass spectrometry (SIFT-MS) analytical technique.

• How SIFT-MS compares with traditional GC-MS analytical methods used for cleanroom and product testing.

• How SIFT-MS delivers immediate analytical results for inorganic gases and VOCs, benefiting product quality and reducing frequency of maintenance and repair.

Who Should Attend:


• Process engineers

• Analytical chemists

• QA/QC managers, engineers and scientists

• Laboratory Managers / Directors / Supervisors

• Researchers / R&D Managers



Dr. Vaughan Langford, Ph.D.,
Director of Applications and Marketing,
Syft Technologies
Yan Li, M.E.,
Applications Team Leader and Semiconductor Industry Specialist,
Syft Technologies


Alexandra A. Taylor
Assistant Editor

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