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Business
Cabot Micro buys patents from IBM
July 10, 2006
| A version of this story appeared in
Volume 84, Issue 28
Cabot Microelectronics has acquired a number of IBM patents relating to chemical mechanical planarization (CMP) slurries. Cabot and IBM worked together in the early days of CMP, a technique used to level semiconductor wafers, and Cabot now calls itself the world leader in the technology. Cabot recently prevailed in a CMP patent infringement complaint that it filed with the U.S. International Trade Commission against South Korea's Cheil Industries.
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