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Materials
BOC, Aviza target deposition process
November 6, 2006
| A version of this story appeared in
Volume 84, Issue 45
Linde's BOC Edwards unit and the semiconductor equipment company Aviza Technology will work together on atomic layer deposition technology, a method of depositing thin films in semiconductor manufacturing. By combining BOC's film precursor chemicals with Aviza's equipment, the partners hope to improve the deposition of high-dielectric-constant materials. BOC says its Flex-ALD precursors allow the deposition of heavier elements not previously processable.
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