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Materials

BOC, Aviza target deposition process

November 6, 2006 | APPEARED IN VOLUME 84, ISSUE 45

Linde's BOC Edwards unit and the semiconductor equipment company Aviza Technology will work together on atomic layer deposition technology, a method of depositing thin films in semiconductor manufacturing. By combining BOC's film precursor chemicals with Aviza's equipment, the partners hope to improve the deposition of high-dielectric-constant materials. BOC says its Flex-ALD precursors allow the deposition of heavier elements not previously processable.

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