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Business
BASF and Evonik Link for CMP Slurries
July 14, 2008
| A version of this story appeared in
Volume 86, Issue 28
German chemical giants BASF and Evonik Industries have agreed to collaborate on the development of ceria-based chemical mechanical planarization (CMP) slurries for fabricating computer chips. The companies say BASF will contribute its CMP slurry formulation chemistry and application know-how. Evonik contributes various grades of cerium oxide and nanomaterial capabilities. They expect to commercialize new slurries by 2009.
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