Rohm and Haas Opens lithography Facility | Chemical & Engineering News
Volume 86 Issue 28 | p. 22 | Concentrates
Issue Date: July 14, 2008

Rohm and Haas Opens lithography Facility

Department: Business
Credit: Rohm and Haas

Rohm and Haas's electronic materials business has opened a $60 million facility in Marlborough, Mass., to support the R&D of semiconductor lithography materials that work with 193-nm light. Jim Fahey, president of the firm's microelectronic technologies business, says the facility supports the company's efforts to develop 193-nm photoresists and patterning materials such as antireflectants and topcoats for immersion lithography.

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