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Cabot Microelectronics has agreed to acquire NexPlanar, a Hillsboro, Ore.-based maker of polishing pads used in chemical mechanical planarization (CMP), a method of polishing silicon wafers during semiconductor fabrication. Cabot will pay $142 million to buy NexPlanar from investors including the semiconductor makers Intel and Samsung. NexPlanar was formed in 2003 and has annual revenue of about $22 million. Cabot says NexPlanar’s thermoset polyurethane pads will complement its own line of thermoplastic polyurethane pads and help it develop tailored slurry-plus-pad sets for customers.
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